Study of Machining Microchannels on Quartz by the Laser-Induced Plasma

Zheng Huang; Cai Ling Feng

doi:10.4028/www.scientific.net/AMR.154-155.1655

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Optimization of Multi-Response Problems Using Taguchi's Quality Loss Function Based on Grey Relational Grade
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 154-155Study of Machining Microchannels on Quartz by the...

Study of Machining Microchannels on Quartz by the Laser-Induced Plasma

Abstract:

In order to fabricate high-quality microchannels in a fused silica, the fundamental frequency laser with the wavelength of 1064nm of a Q-switched Nd:YAG laser and the mixing laser composed of 70 percent second harmonic laser and 30 percent fundamental frequency laser are used to irradiate a fused silica substrate respectively to induce the plasma, by which microchannels in a fused silica substrate were fabricated.The result show that the interior wall of the microchannels processed by mixing laser are smoother and the drilling rate is faster than ones processed by fundamental frequency. Furthermore, the depth of the microchannels processed by the mixing laser is up to 8mm, longer than the depth of 4mm reported at present. The reasons of causing to the differences between two kinds of processing are analyzed.

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Periodical:

Advanced Materials Research (Volumes 154-155)

Pages:

1655-1658

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.154-155.1655

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Online since:

October 2010

Authors:

Zheng Huang, Cai Ling Feng

Keywords:

Laser Processing, Micro-Channel, Micro-Electromechanical System (MEMS), Nd:YAG Laser

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