Study of Machining Microchannels on Quartz by the Laser-Induced Plasma
In order to fabricate high-quality microchannels in a fused silica, the fundamental frequency laser with the wavelength of 1064nm of a Q-switched Nd:YAG laser and the mixing laser composed of 70 percent second harmonic laser and 30 percent fundamental frequency laser are used to irradiate a fused silica substrate respectively to induce the plasma, by which microchannels in a fused silica substrate were fabricated.The result show that the interior wall of the microchannels processed by mixing laser are smoother and the drilling rate is faster than ones processed by fundamental frequency. Furthermore, the depth of the microchannels processed by the mixing laser is up to 8mm, longer than the depth of 4mm reported at present. The reasons of causing to the differences between two kinds of processing are analyzed.
Zhengyi Jiang, Xianghua Liu and Jinglong Bu
Z. Huang and C. L. Feng, "Study of Machining Microchannels on Quartz by the Laser-Induced Plasma", Advanced Materials Research, Vols. 154-155, pp. 1655-1658, 2011