Effect of Working Pressure on Microstructure and Mechanical Properties of Magnetron Sputtered ZrN Coatings

Zheng Bing Qi; Peng Sun; Fang Ping Zhu; Ruo Xuan Huang; Zhou Cheng Wang; Dong Liang Peng; Chong Hu Wu

doi:10.4028/www.scientific.net/AMR.154-155.1659

Paper Titles

Study on the Mechanism of Prolonging Service Life of Tap in Low Frequency Torsional Vibration Tapping
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Investigation on the Structure and Properties of TiAlN Coatings Deposited by DC Reactive Magnetron Sputtering
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Optimization of Multi-Response Problems Using Taguchi's Quality Loss Function Based on Grey Relational Grade
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Study of Machining Microchannels on Quartz by the Laser-Induced Plasma
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Effect of Working Pressure on Microstructure and Mechanical Properties of Magnetron Sputtered ZrN Coatings
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Effect of Substrate Temperature on Structure and Mechanical Properties of ZrN Coatings
p.1664

Computational Analysis for Dynamic Characteristics of Drilling Shaft System in Deep Slot Hole Drilling
p.1668

Phase-Field Simulation of Process in Sintering Ceramics
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Research on the Effects of Ultrasonic Frequencies on the Grinding Surface Quality of Nano-Composite Ceramics
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 154-155Effect of Working Pressure on Microstructure and...

Effect of Working Pressure on Microstructure and Mechanical Properties of Magnetron Sputtered ZrN Coatings

Abstract:

The influence of working pressure on microstructure and mechanical properties of magnetron sputtered ZrN coatings were systemically investigated. The results reveal that a decreased working pressure results in preferred orientation evolution from (111) to (200) and cross-sectional morphologies transition from columnar structure to equiaxed grains. These microstructural changes are considered responsible for an increase in hardness and modulus with decreasing working pressure. Chip spallation and plastic deformation failure modes are observed during scratch testing, and the increased critical loads are attributed to higher hardness and elastic modulus, as well as moderate compressive stress at lower working pressure.

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Advanced Materials Research (Volumes 154-155)

Pages:

1659-1663

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.154-155.1659

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Online since:

October 2010

Authors:

Zheng Bing Qi, Peng Sun, Fang Ping Zhu, Ruo Xuan Huang, Zhou Cheng Wang, Dong Liang Peng, Chong Hu Wu

Keywords:

Coating, Mechanical Property, Microstructure, Working Pressure, ZrN

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