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Displacement Amplification of Electrostatically-Driven Microgripper in a Hybrid Design with Electrothermal Actuation

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Abstract:

By the growing development of micro electromechanical systems, the application of microgrippers for handling and assembling of microparts attracts more attention. In this paper, an electrostatic microgripper using comb drive mechanism is designed and a formulation is presented to predict the critical voltage for pull-in instability threshold. Then the advantages of a modified model of electrothermal U-shape actuator with large forces and bilateral displacement are utilized to amplify the output displacement range of microgripper prongs. To show this amplification, finite element simulations are performed on the primary and modified microgripper proposed models.

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Periodical:

Advanced Materials Research (Volume 159)

Pages:

313-320

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.159.313

Citation:

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Online since:

December 2010

Authors:

Mohsen Hamedi, Parisa Salimi, Milad Vismeh

Keywords:

Comb-Drive, Electrostatic Microgripper, Electrothermal Actuator, Micro-Electromechanical System (MEMS)

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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