Wireless RFID-Based Thermal Bubble Type Accelerometer and Monitor System Design

Jium Ming Lin; Po Kuang Chang; Cheng Hung Lin; Qi Kun Zhang; Shih Chieh Wang

doi:10.4028/www.scientific.net/AMR.159.321

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 159Wireless RFID-Based Thermal Bubble Type...

Wireless RFID-Based Thermal Bubble Type Accelerometer and Monitor System Design

Abstract:

This research proposes a wireless RFID-based thermal bubble accelerometer design, and relates more particularly for the technology to manufacture it on a flexible substrate. The key technology is to integrate both a thermal bubble accelerometer and a wireless RFID antenna on the same substrate, such that the accelerometer is very convenient for usage. In this paper we use xenon inert gas in the chamber with heavier molecular weight to increase the acceleration sensitivity instead of traditional air or carbon dioxide. On the other hand, the specific heat of xenon gas is also lower so that the bandwidth of the proposed accelerometer is larger and the power consumption is lower. In addition, the inner shape of the chamber is changed as hemisphere instead of rectangular type, comparisons are also made. We have seen that the sensitivity of the proposed design is better.

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Periodical:

Advanced Materials Research (Volume 159)

Pages:

321-326

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.159.321

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Online since:

December 2010

Authors:

Jium Ming Lin, Po Kuang Chang, Cheng Hung Lin, Qi Kun Zhang, Shih Chieh Wang

Keywords:

Accelerometer, Flexible Substrate, Thermal Bubble Type, Wireless RFID-Based

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References

[1] Y. Hua, L. Jiang, Y. Cai, A. Leung, Y. Zhao, U.S. Patent：US 0, 101, 813 A1. (2007).

Google Scholar

[2] T.R. Hsu, in: MEMS & Microsystems Design and Manufacture, INSPEC, The Institution of Electrical Engineer, London, U. K. (2004).

Google Scholar

[3] L.M. Roylance and J.B. Angell: IEEE Transactions on Electron Devices, Vol. ED-26 (1979), p. (1911).

Google Scholar

[4] P.M. Zavracky, F. Hartley, N. Sherman, T. Hansen and K. Warner: 7th lnt. Conf. Solid-State Sensors and Actuators (Transducers'93) (1993), Yokohama, Japan, p.50.

Google Scholar

[5] H.K. Rockstad, J.K. Reynolds, T.K. Tang, T.W. Kenny, W.J. Kaiser and T.B. Gabrieison: Solid-State Sensors and Actuators A (1996), Vol. 53, p.277.

Google Scholar

[6] L. Lin, R.T. Howe, and A.P. Pisano: J. Micro-Electromechanical System, Vol. 7 (1998), p.294.

Google Scholar

[7] J.M. Lin, P.K. Chang, C.H. Lin and Q.K. Zhang: submitted to The 2nd Asian Pacific International Conference on RFID, December 3, 2010, National Taipei University of Technology, Taipei, Taiwan (2010).

Google Scholar