Hydrogen Dilution Influence on the SiC Films Preparation and Structural Properties as the Window Layer of p-i-n Solar Cell

Abstract:

The SiC thin films as the window layer of p-i-n solar cell was prepared by PECVD technology in this article,investigated the influence of hydrogen dilution on the structure and optical properties of SiC thin films,found the optimal growth craft under the same conditions. The results showed that the optical band-gap of the window layer achieved the widest 2.2ev when hydrogen dilution rate was 6.25, furthermore, got inerratic surface morphology with deposition rate up to 0.1nm / s.

• Periodical: Advanced Materials Research (Volumes 160-162)
• Pages: 1228-1232
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.160-162.1228
• Online since: November 2010
• Authors: Bao Yu Xu, Hui Dong Yang, Bo Huang, Jun Dai Shi
• Keywords: PECVD, SiC Thin Films, Window Layer

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