Modal Analysis of Externally Pressurized Air Bearing Workbench Based on Spring-Mass System Method

Abstract:

The stiffness of externally pressurized air bearing is nonlinear, so it is difficult for nonlinear modeling and modal analysis with Finite Element Modal Analysis(FEMA). In this paper, the spring-mass system method which use linear springs in place of nonlinear air bearing has been developed to make FEMA of externally pressurized air bearing workbench more easier and faster. The actual modes of the workbench have also been attained with Experimental Modal Analysis (EMA). The results of EMA have a good agreement with FEAM results ,which verifies the feasibility of spring-mass system method.

• Periodical: Advanced Materials Research (Volume 188)
• Pages: 602-607
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.188.602
• Online since: March 2011
• Authors: Bo Zhang, Ping Ma, J.J. Huang
• Keywords: EMA, Externally Pressurized Air Bearing, FEMA, Spring

References

[1] Chen xuedong , He xuemin．Research Ultraprecise Positioning Stage With Gas-Lubricated Bearing —Dynamics And Control Of The Gas-Lubricated System [M] Wuhan Huazhong University of Science and Technology press , (2007).

[2] Kim WJ, Hu TJ, Bhat ND．Design and Control of a 6-DOF High-Precision Integrated Positioner[A]．Proceeding of the 2004 American Control Conference[C]．Boston, Massachusetts, 2004, 2493-2498.

DOI: 10.23919/acc.2004.1383839

[3] Yang B, Henke M, Grotstollen H．Pithch analysis and Control Design for the Linear Motor of a Railway Carriage[J]．IEEE Industry Applications Conference, 2001, (4): 2360-2365.

DOI: 10.1109/ias.2001.955952

[4] Chen Yaying, Zhu Yu, Duan Guanghong. A Study on Ultra-precision Gas Bearing Stage Equipped with Electrorheological Damper [J]. Lubrication Engineering. 2007, (2): 7-9.

DOI: 10.1049/cp:20060897

[5] Zhang Congpeng, Liu Qiang．Development of High-performance Linear Motor Stage Based on Static-pressure Air-bearing Slider [J]. Mechanical Science And Technology, 2006, 25（10）：1212—1216.

[6] Zhang Ming, Zhu Yu, Duan Guanghong. Micro-vibration of Ultra-precision Gas Bearing Linear Motion Stage and Its Elimination [J]. Manufacturing Technology & Machine Tool 2005(11) : 47-49.

DOI: 10.1049/cp:20061044

[7] Chen xuedong, Xie Dedong, He Xueming. Structure Dynamic Modeling and Analysis of Precision Linear Motor with Air-bearings [J]. Journal Of Wuhan University Of Technology, 2008（5）: 117-121.

[8] Chen Xuedong , Bao Xiulan. Vibration analysis of ultra-precision stage with air-bearing [J]. Journal Of Huazhong University Of Science And Technology. Nature Science, 2005. (11): 5-8.

[9] Chen Aimin, Ma Ping , Gong Zheng. Comparison of the Loading Capacity Analysis of Aerostatic Guide Way Based on Analytic Method and Finite Element Method [J]. Lubrication Engineering, 2009, 12 (6): 43-48.