Preparation and Oxide CMP Performance of Inorganics Coated Polystyrene Composite Particles

Yang Chen; Zhi Gang Chen

doi:10.4028/www.scientific.net/AMR.189-193.273

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 189-193Preparation and Oxide CMP Performance of...

Preparation and Oxide CMP Performance of Inorganics Coated Polystyrene Composite Particles

Abstract:

CeO₂-coated Polystyrene (CeO₂/PS) and SiO₂-coated Polystyrene (SiO₂/PS) composite particles were synthesized by chemical precipitation method. The as-synthesized composite particles samples were characterized by X-ray diffraction (XRD), transmission electron microscope (TEM), field emission scanning electron microscope (FESEM), thermogravimetric analysis (TGA) and Zeta potential measurement. The oxide chemical mechanical polishing (CMP) performance of the as-papered composite particles was studied by atomic force microscope (AFM). The results indicated that CeO₂/PS composite particles had core-shell morphology and PS particles were uniformly coated by fluorite-structured CeO₂. The Strawberry-shaped SiO₂/PS composite particles were obtained, which particle size is about 200-300 nm. Surface roughness (RMS) within 5 μm×5 μm area of thermal oxide film surface after polished by CeO₂/PS and SiO2/PS composite particles was decreased to 0.227 nm and 0.222 nm, respectively.

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Periodical:

Advanced Materials Research (Volumes 189-193)

Pages:

273-278

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https://doi.org/10.4028/www.scientific.net/AMR.189-193.273

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Online since:

February 2011

Authors:

Yang Chen, Zhi Gang Chen

Keywords:

CMP, Core-Shell Structure, PS/CeO₂ Composite Particle, PS/SiO₂ Composite Particle

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