Preparation and Oxide CMP Performance of Inorganics Coated Polystyrene Composite Particles

Abstract:

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CeO2-coated Polystyrene (CeO2/PS) and SiO2-coated Polystyrene (SiO2/PS) composite particles were synthesized by chemical precipitation method. The as-synthesized composite particles samples were characterized by X-ray diffraction (XRD), transmission electron microscope (TEM), field emission scanning electron microscope (FESEM), thermogravimetric analysis (TGA) and Zeta potential measurement. The oxide chemical mechanical polishing (CMP) performance of the as-papered composite particles was studied by atomic force microscope (AFM). The results indicated that CeO2/PS composite particles had core-shell morphology and PS particles were uniformly coated by fluorite-structured CeO2. The Strawberry-shaped SiO2/PS composite particles were obtained, which particle size is about 200-300 nm. Surface roughness (RMS) within 5 μm×5 μm area of thermal oxide film surface after polished by CeO2/PS and SiO2/PS composite particles was decreased to 0.227 nm and 0.222 nm, respectively.

Info:

Periodical:

Advanced Materials Research (Volumes 189-193)

Edited by:

Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang

Pages:

273-278

DOI:

10.4028/www.scientific.net/AMR.189-193.273

Citation:

Y. Chen and Z. G. Chen, "Preparation and Oxide CMP Performance of Inorganics Coated Polystyrene Composite Particles", Advanced Materials Research, Vols. 189-193, pp. 273-278, 2011

Online since:

February 2011

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$35.00

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