Preparation and Oxide CMP Performance of Inorganics Coated Polystyrene Composite Particles
CeO2-coated Polystyrene (CeO2/PS) and SiO2-coated Polystyrene (SiO2/PS) composite particles were synthesized by chemical precipitation method. The as-synthesized composite particles samples were characterized by X-ray diffraction (XRD), transmission electron microscope (TEM), field emission scanning electron microscope (FESEM), thermogravimetric analysis (TGA) and Zeta potential measurement. The oxide chemical mechanical polishing (CMP) performance of the as-papered composite particles was studied by atomic force microscope (AFM). The results indicated that CeO2/PS composite particles had core-shell morphology and PS particles were uniformly coated by fluorite-structured CeO2. The Strawberry-shaped SiO2/PS composite particles were obtained, which particle size is about 200-300 nm. Surface roughness (RMS) within 5 μm×5 μm area of thermal oxide film surface after polished by CeO2/PS and SiO2/PS composite particles was decreased to 0.227 nm and 0.222 nm, respectively.
Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang
Y. Chen and Z. G. Chen, "Preparation and Oxide CMP Performance of Inorganics Coated Polystyrene Composite Particles", Advanced Materials Research, Vols. 189-193, pp. 273-278, 2011