Study on the Size Shrinking and Shape Changing of Solid-State Nanopores
Nanopores etched in the solid-state membranes have become the hotpot of nanotechnology research. Various methods for fabricating solid-state nanopores have been developed and reported, but the fabrication of nanopore is also a difficult challenge. In this paper, we milled nanopores of different sizes in the free-stand and low-stress solid-state membranes. And then the area around nanopores were scanned with the diffused ion beam, we found that the sediment around will melt and the shape of the nanopore becomes circular.
Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang
L. P. Liu et al., "Study on the Size Shrinking and Shape Changing of Solid-State Nanopores", Advanced Materials Research, Vols. 189-193, pp. 3218-3221, 2011