Study on the Size Shrinking and Shape Changing of Solid-State Nanopores

Li Ping Liu; Hong Wen Wu; Yang Xuan; Xiao Juan Wang; Yan Zhang; Yi Wen Chen; Quan Jun Liu

doi:10.4028/www.scientific.net/AMR.189-193.3218

Paper Titles

Grinding Performance of Porous Diamond Wheels on Different Materials
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Research on the Vibration Tapping Performance of Particle Reinforced Aluminum Matrix Composites
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Study on Cutting Process of Manual SHS Cutting Technology
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Wear of Uncoated HSS Tools in Drilling Difficult-to-Machine Materials with Water Vapor as Coolant and Lubricant
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Study on the Size Shrinking and Shape Changing of Solid-State Nanopores
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Ice Accretion of Glaze Loads Model on Wires of Power Transmission Lines
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Study of Flux on Wetting Behavior of Sn-Zn Lead-Free Solders
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Ice Accretion Cause and Mechanism of Glaze on Wires of Power Transmission Lines
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Acoustic Signal Recognition Based on Time Series Model
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 189-193Study on the Size Shrinking and Shape Changing of...

Study on the Size Shrinking and Shape Changing of Solid-State Nanopores

Abstract:

Nanopores etched in the solid-state membranes have become the hotpot of nanotechnology research. Various methods for fabricating solid-state nanopores have been developed and reported, but the fabrication of nanopore is also a difficult challenge. In this paper, we milled nanopores of different sizes in the free-stand and low-stress solid-state membranes. And then the area around nanopores were scanned with the diffused ion beam, we found that the sediment around will melt and the shape of the nanopore becomes circular.

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Periodical:

Advanced Materials Research (Volumes 189-193)

Pages:

3218-3221

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.189-193.3218

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Online since:

February 2011

Authors:

Li Ping Liu, Hong Wen Wu, Yang Xuan, Xiao Juan Wang, Yan Zhang, Yi Wen Chen, Quan Jun Liu

Keywords:

Focused Ion Beam (FIB), Shape, Shrinking, Silicon Nitride Membrane, Solid-State Nanopore

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