Microring Resonator Chemical Sensor Based on Si₃N₄ Waveguides

Abstract:

Microring resonator based on Si₃N₄ waveguides was fabricated by using CMOS compatible processes with 1 µm wide waveguides and 200 µm in radius. The optical characteristic of the resonator was measured with a Q factor up to 20,000 and a free spectrum range (FSR) of 1 nm. The structure was further packaged to be a sensor for liquid sensing. Finally, the sensor was applied to detect concentrations of glucose solutions with sensitivity of 1.78×10^-5 refractive index unit (RIU), which proves its functionality and feasible application as high sensitivity chemical sensor.

• Periodical: Advanced Materials Research (Volumes 199-200)
• Pages: 1954-1957
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.199-200.1954
• Online since: February 2011
• Authors: Yao Chen
• Keywords: Chemical Sensor, Glucose, Microring Resonator, Q Factor

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