Design and Analysis of Hydrostatic Bearing Slide Used Linear Motor Direct-Drive
This paper discusses the design and analysis of a direct-drive linear slide used linear mortor. The alloy steel carriage is fully ﬂoated by twelve hydrostatic bearings, and it is force-closed. It has very high stiffnesses, 1700N/mm in vertical direction and 690N/mm in horizontal direction. The working stroke of slide is 200 mm. The slide is driven by a ironless linear motor. The optic linear encoder was used for the measurements and feedback. To analyze the static and dynamic performance of the slide, the modelling and simulation process, using the finite element analysis method, is presented.
G. A. Hou and T. Sun, "Design and Analysis of Hydrostatic Bearing Slide Used Linear Motor Direct-Drive", Advanced Materials Research, Vols. 211-212, pp. 666-670, 2011