Control Design Applied to a Micro Electro Mechanical System: MEMS Comb Drive
This paper presents the linear optimal control technique for reducing the chaotic movement of the micro-electro-mechanical Comb Drive system to a small periodic orbit. We analyze the non-linear dynamics in a micro-electro-mechanical Comb Drive and demonstrated that this model has a chaotic behavior. Chaos control problems consist of attempts to stabilize a chaotic system to an equilibrium point, a periodic orbit, or more general, about a given reference trajectory. This technique is applied in analyzes the nonlinear dynamics in an MEMS Comb drive. The simulation results show the identification by linear optimal control is very effective.
A. Bonato Altran et al., "Control Design Applied to a Micro Electro Mechanical System: MEMS Comb Drive", Advanced Materials Research, Vols. 217-218, pp. 33-38, 2011