Super alloys is the ideal material for high temperature components although it has a great difficulty to cut, especially drilling. Minimum Quantity Lubrication (MQL) has a good advantage of green, lubricating and cooling effect. Comparison experiments of MQL cooling drilling and pouring cooling drilling were done with coolant holes in drill. The results show that: the maximum measure temperature is less than 100°C and the amount of wear is very small. Internal Minimum Quantity Lubrication drilling is an effective process to solve problems of high temperature and wear fast for super alloys drilling.