Thermoelastic Damping in Microbeam Resonators with a Proof Mass

Abstract:

Predicting thermoelastic damping is crucial for the design of high Q MEMS devices. In the past, for the thermoelastic damping in microbeam resonators, Zener’s model (1937 Physical Review 52 230-5; 1938 Physical Review 53 90-9) and Lifshitz and Roukes’ model (2000 Physical Review B 61 5600-9) can give a reasonable prediction. However, the derivations of Zener’s model and Lifshitz and Roukes’ model are only suitable for a simple beam with no proof mass. The microbeam with a proof mass is a common element in many MEMS devices. In this paper, a general proof is presented that shows LR’s model is also valid for the TED in the microbeams with a proof mass. The derivation in this paper is based on a general case.

• Periodical: Advanced Materials Research (Volumes 230-232)
• Pages: 1185-1189
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.230-232.1185
• Online since: May 2011
• Authors: Ru Fu Hu, Yan Ning Deng, Pu Li
• Keywords: Micro-Electromechanical System (MEMS), Micro-Resonator, Quality Factor, Thermoelastic Damping

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