The preparation and properties of indium tin oxide (ITO) coated transparent polyimide substrates were reported in the paper. The transparent polyimide films were prepared through thermal imidization of poly(amic acid) films. Transparent conducting ITO films were prepared on polyimide substrates by magnetron-sputtering technique at room temperature. The optical and electrical properties of the obtained films have been investigated. Polycrystalline ITO films were deposited with resistivity as low as 10-4 Ω.cm on polyimide substrates. The average transmittance exceeded 78% in the visible spectrum for 200nm thick films deposited on polyimide.