Effect of Catalysts on Preparation of Sol-Gel Derived Si02 Antireflective Coating

Abstract:

Article Preview

Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic agent can effectively effect the structure of SiO2 thin film.

Info:

Periodical:

Advanced Materials Research (Volumes 239-242)

Edited by:

Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He

Pages:

1313-1316

DOI:

10.4028/www.scientific.net/AMR.239-242.1313

Citation:

Y. C. Wang and R. M. Jin, "Effect of Catalysts on Preparation of Sol-Gel Derived Si02 Antireflective Coating", Advanced Materials Research, Vols. 239-242, pp. 1313-1316, 2011

Online since:

May 2011

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.