Effect of Catalysts on Preparation of Sol-Gel Derived Si02 Antireflective Coating

Yu Cang Wang; Rui Min Jin

doi:10.4028/www.scientific.net/AMR.239-242.1313

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 239-242Effect of Catalysts on Preparation of Sol-Gel...

Effect of Catalysts on Preparation of Sol-Gel Derived Si0₂ Antireflective Coating

Abstract:

Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO₂ particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic agent can effectively effect the structure of SiO₂ thin film.

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Periodical:

Advanced Materials Research (Volumes 239-242)

Pages:

1313-1316

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.239-242.1313

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Online since:

May 2011

Authors:

Yu Cang Wang, Rui Min Jin

Keywords:

Antireﬂective Coating, Catalyst, Sol-Gel (SG)

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