Effect of Catalysts on Preparation of Sol-Gel Derived Si02 Antireflective Coating
Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic agent can effectively effect the structure of SiO2 thin film.
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
Y. C. Wang and R. M. Jin, "Effect of Catalysts on Preparation of Sol-Gel Derived Si02 Antireflective Coating", Advanced Materials Research, Vols. 239-242, pp. 1313-1316, 2011