Characteristics of SnOx-ZnO Composite Film on Poly Ethylene Terephalate (PET) Substrate Prepared by ECR-MOCVD

Ji Hun Park; Dong Jin Byun; Joong Kee Lee

doi:10.4028/www.scientific.net/AMR.26-28.515

Paper Titles

Sintering Mechanism of Composite Ag Nanoparticles and its Application to Bonding Process-Effects of Ag₂CO₃ Contents on Bondability to Cu-
p.499

Studies for the Influences of Welding Parameters of GMA Welded 600MPa Grade TRIP Steel
p.503

Effects of the Process Parameters on Beads by Plasma Arc Welding of the Membrane for LNG Ships
p.507

The Effect of Post Weld Heat Treatment on Mechanical Properties of Friction-Welded Alloy 718 and SNCRW Stainless Steel
p.511

Characteristics of SnO_x-ZnO Composite Film on Poly Ethylene Terephalate (PET) Substrate Prepared by ECR-MOCVD
p.515

Thermodynamic Calculation of Alpha-Case Formation in Titanium Alloys
p.519

Functions and Morphology of Metal Lead Addition to Ancient Chinese Bronzes
p.523

In Situ Combustion Synthesis of Ti-Al Intermetallic Compounds in Al Alloy Casting Process
p.527

Permanent Mold Casting Practice and Microstructure and Mechanical Properties of Thin-Sectioned ADI Casting
p.531

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 26-28Characteristics of SnOx-ZnO Composite Film on Poly...

Characteristics of SnO_x-ZnO Composite Film on Poly Ethylene Terephalate (PET) Substrate Prepared by ECR-MOCVD

Abstract:

Zinc oxide and tin oxide (ZnSnOx) films on PET (Polyethylene Terephthalate) substrate were prepared by the electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) under an hydrogen, oxygen and argon atmosphere. The used tin and zinc precursor are TMT (tetramethyltin) and DEZn(diethylzinc), respectively. The metal (Zinc and Tin) oxidation content plays an important role to control the optical and electrical characteristics of the films. Therefore the optimum DEZn/TMT content can be determined by the counter stability effect between oxidation and zinc-tin deposition. The obtained ZnSnOx (or SnOx-ZnO) of high mobility films exhibited c.a. 7.0×10-3 ohm ·cm of electrical resistivity.