Multi-Sphere Mirror Design of YAG Laser Applied for Glass Substrate Cutting

Abstract:

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A thermal fracture process applied to the brittle materials has become a foremost technology, and applied to cut the LCD glass substrate. One advantage of this process is that the cross-section of cut glass substrate will be smooth with low residual stress after thermal fracture processing. The multi-sphere mirror aims to repeatedly reflect the light energy within upper and lower mirror in order to enhance the laser beam absorption rate of glass under cutting. Moreover, with a proper design of multi-sphere mirror, the energy distribution of applied laser can provide an ideal thermal fracture condition to improve cutting speed of glass substrate. A novel reflective mirror with multi-sphere surface was developed and reported to transform the regular laser energy distribution toward the ideal one. Furthermore, the shape of multi-sphere mirror is optimized by Taguchi method so as to meet the surface requirement that can get the ideal energy distribution. This paper presents a series of simulation results and analysis results of multi-sphere mirror calculated by the TracePro opto-mechanical software.

Info:

Periodical:

Advanced Materials Research (Volumes 264-265)

Edited by:

M.S.J. Hashmi, S. Mridha and S. Naher

Pages:

1246-1251

DOI:

10.4028/www.scientific.net/AMR.264-265.1246

Citation:

W. H. Wu et al., "Multi-Sphere Mirror Design of YAG Laser Applied for Glass Substrate Cutting", Advanced Materials Research, Vols. 264-265, pp. 1246-1251, 2011

Online since:

June 2011

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Price:

$35.00

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