Adaptive Control of Vertical Stage of a Robot Arm for Wafer Handling

Chi Zhang; Guang Zhou Zhao; F P M Dullens

doi:10.4028/www.scientific.net/AMR.267.614

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 267Adaptive Control of Vertical Stage of a Robot Arm...

Adaptive Control of Vertical Stage of a Robot Arm for Wafer Handling

Abstract:

In this paper, a 4 degree-of-freedom robot arm used for wafer handling is proposed. The dynamic modeling of the vertical axis which includes a simplified friction model is derived. This friction model is fitted through the measured friction data. An adaptive controller is designed for this model and the influence of the control parameters as well as the learning rate is studied. In the experimental stage, the adaptive control parameter and learning rate are tuned. Finally the performance of the adaptive controller is compared to a PD controller and it is shown that the performance of the adaptive controller is better.

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Periodical:

Advanced Materials Research (Volume 267)

Pages:

614-619

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.267.614

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Online since:

June 2011

Authors:

Chi Zhang, Guang Zhou Zhao, F P M Dullens

Keywords:

Adaptive Control, Robot Arm, Vertical Axis Control, Wafer Handling

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References

[1] M. Cong and D. Cui, Wafer Handling Robot and Applications, Recent patents on Engineering, Vol. 3, No. 3, pp.170-177, (2009).

DOI: 10.2174/187221209789117762

Google Scholar

[2] M. W. Spong, S. Hutchinson and M. Vidyasagar. Robot Modeling and Control. New Jersey: John Wiley & Sons, Inc, (2006).

Google Scholar

[3] H. A. ElMaraghy and B. Johns, An Investigation Into the Compliance of SCARA Robots. Part I: Analytical Model, Journal of Dynamic Systems, Measurement, and Control, Volume 110, Issue 1, pp.18-23, March (1988).

DOI: 10.1115/1.3152641

Google Scholar

[4] Meng Joo Er., Moo Teng Lim, Hui Song Lim, Real-time hybrid adaptive fuzzy control of a SCARA robot, Microprocessors and Microsystems 25, (2001).

DOI: 10.1016/s0141-9331(01)00127-2

Google Scholar

[5] C. Zhang, G. Zhao, Y. Xiao, X. Yang, Decoupling Robust Control of Three-Link Direct Drive Robot Arm, Proceedings of the 2nd International Conference on Intellectual Technique in Industrial Practice, Sept. (2010).

DOI: 10.4028/www.scientific.net/amr.443-444.258

Google Scholar

[6] C. Canudas de Wit and P. Lischinsky, Adaptive Friction Compensation with Partially Known Dynamic Friction Model, Int. J. of Adap. Contr. and Sig. Process, Vol. 11, No. 1, pp.65-80, (1997).

DOI: 10.1002/(sici)1099-1115(199702)11:1<65::aid-acs395>3.0.co;2-3

Google Scholar

[7] D.S. Bayard, A Forward Method for Optimal Stochastic Nonlinear and Adaptive Control, IEEE Trans. of. Autom. Control, Vol. 36, No. 9, pp.1046-1053, (1991).

DOI: 10.1109/9.83535

Google Scholar