Titanium dioxide nanotube array films on aluminum plate were prepared via liquid phase deposition (LPD) method. The samples were characterized by field-emission scanning electron microscopy (FE-SEM) with energy dispersive spectroscopy (EDS), X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FT-IR). The results show that the nanotube array films’ morphology depends on the anodic aluminum oxide (AAO) structure and deposition time. The titanium dioxide nanotube’s outside diameter is about 250 nm, the wall thickness is approximately 40 nm. The as-prepared TiO2 array films are amorphous and anatase appeared after calcining at 400°C for 2 hrs. FT-IR spectrum indicates that there are lots of hydroxyl groups on the surface of AAO. When AAO was immersed into 0.1 M (NH4)2TiF6 solution at room temperature, AAO was dissolved in the solution and the holes became wide. The hydrolysis reaction was shifted to the right-hand side, TiO2 particles locked in-situ on the inner surface of the anodic alumina pore induced by hydroxyl group, thus nanotube array film was obtained.