Sensitivity to NO2 of ZnO Film Prepared by Electrostatic-Enhanced Ultrasonic Spray Pyrolysis
The NO2-sensing properties of the ZnO films prepared by EUSP were investigated. Effect of substrate temperature on the NO2-sensing properties of ZnO films showed that the powder-like ZnO film deposited at 550°C was more sensitive to NO2, and the film illustrated good response-restoration property. Besides, the influence of doping amount on the NO2-sensing properties of the ZnO films at 260°C showed that the ZnO:Al film with the Al content of 0.4mol% presented the best sensitivity, and the ZnO: 3mol % Ag exhibited the highest NO2 sensitivity. The dynamic response tests indicated that the ZnO: Al film was of the highest sensitivity to NO2, and the sensitivity of ZnO: Ag film was lowest.
Jianzhong Wang and Jingang Qi
J. H. Min et al., "Sensitivity to NO2 of ZnO Film Prepared by Electrostatic-Enhanced Ultrasonic Spray Pyrolysis", Advanced Materials Research, Vols. 299-300, pp. 475-479, 2011