Sensitivity to NO2 of ZnO Film Prepared by Electrostatic-Enhanced Ultrasonic Spray Pyrolysis

Jia Hua Min; Xiao Yan Liang; Bin Wang; Yue Zhao; Yun Guo; Lin Jun Wang

doi:10.4028/www.scientific.net/AMR.299-300.475

Paper Titles

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Oxidation Behavior of a New Ni-Base Superalloy in Air at 850°C and 950°C
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Injection Molding Preparation and Film Formation Performance of Powders-Modified Polyethylene Biomass Carrier for Aerobic Process
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Sensitivity to NO₂ of ZnO Film Prepared by Electrostatic-Enhanced Ultrasonic Spray Pyrolysis
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Fabrication and Sinter-Ability of Ce³⁺-Doped YAG Ceramics by Low-Temperature Combustion Method
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Sensitivity to NO₂ of ZnO Film Prepared by Electrostatic-Enhanced Ultrasonic Spray Pyrolysis

Abstract:

The NO₂-sensing properties of the ZnO films prepared by EUSP were investigated. Effect of substrate temperature on the NO₂-sensing properties of ZnO films showed that the powder-like ZnO film deposited at 550°C was more sensitive to NO₂, and the film illustrated good response-restoration property. Besides, the influence of doping amount on the NO₂-sensing properties of the ZnO films at 260°C showed that the ZnO:Al film with the Al content of 0.4mol% presented the best sensitivity, and the ZnO: 3mol % Ag exhibited the highest NO2 sensitivity. The dynamic response tests indicated that the ZnO: Al film was of the highest sensitivity to NO₂, and the sensitivity of ZnO: Ag film was lowest.