Research on Intelligentized Recognition Technology for Double Wavelength Laser Measurement of Thin Film Thickness
Interference image processing is the key technology of optical interference measurement. This paper introduced the problems on automatic interference fringe processing in absolutely measurement based on laser interference, digital image processing technology. The image acquisition of the SiO2 film and the pre-processing of interferogram was performed.Decimal part of the interference fringes is obtained. Using high-resolution image acquisition system and computer reads and processes the interference image, replaces the traditional work of skilled workers of high intensity for a long time and improves the film thickness measurement accuracy.
Riza Esa and Yanwen Wu
H. R. Li et al., "Research on Intelligentized Recognition Technology for Double Wavelength Laser Measurement of Thin Film Thickness", Advanced Materials Research, Vols. 301-303, pp. 1760-1764, 2011