Research on Intelligentized Recognition Technology for Double Wavelength Laser Measurement of Thin Film Thickness

Hao Ran Li; Jun Hong Su; Ai Ming Ge; Li Hong Yang

doi:10.4028/www.scientific.net/AMR.301-303.1760

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 301-303Research on Intelligentized Recognition Technology...

Research on Intelligentized Recognition Technology for Double Wavelength Laser Measurement of Thin Film Thickness

Abstract:

Interference image processing is the key technology of optical interference measurement. This paper introduced the problems on automatic interference fringe processing in absolutely measurement based on laser interference, digital image processing technology. The image acquisition of the SiO₂ film and the pre-processing of interferogram was performed.Decimal part of the interference fringes is obtained. Using high-resolution image acquisition system and computer reads and processes the interference image, replaces the traditional work of skilled workers of high intensity for a long time and improves the film thickness measurement accuracy.

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Periodical:

Advanced Materials Research (Volumes 301-303)

Pages:

1760-1764

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.301-303.1760

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Online since:

July 2011

Authors:

Hao Ran Li, Jun Hong Su, Ai Ming Ge, Li Hong Yang

Keywords:

FFT Method, Interference Fringe Processing, Laser Interference Measurement, Thin Film

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References

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