Contour matching is one of the important problems concerned in 3-D reconstruction field. According to the difficulties of defect contour matching in defect modeling, a method based on similarity measure is presented in this paper. In this method, the theory of similarity measure is introduced to quantitatively describe the similarity of two contours. And the value of similarity measure is set as the criterion to judge matching relation between two contours in consecutive slices. For reducing computational complexity and improving accuracy of contours matching, a candidate matching field of contour is proposed. The efficiency of this algorithm has been verified by a typical example and satisfying results have been obtained.