Power Consumption Saving of Chiller Water System for Semiconductor Factory in Taiwan
Recently, the semiconductor manufacturing industry has exhibited not only fast growth, but intense power consumption. Consequently, reducing power consumption is critical for running reliability. A view of literature reveals that the power consumption of facility system is 56.6 % in the fabs. Among all facility systems, chiller plants are the largest energy users, consuming 27.2 % of the total power consumption. Therefore, saving power consumption for chiller plants involves a considerable economic benefit. In addition, cooling the water temperature further improves the efficiency of chillers. Hence, this report analyzes the optimal temperature between the chiller and cooling tower. Currently, controlling the chiller and cooling tower are separate processes, though, in fact, they should not be. This is because the water cooling temperature affects the efficiency of the chiller. Each reduced degree of the chiller condenser temperature reduces the electrical power by approximately 2 % in the cooling tower, in contrast to the chiller. Therefore, the optimal water cooling water temperature must be analyzed. The analysis method in this report is linear regression. First, determine the equations of power consumption for the chiller and cooling tower with variables representing the water cooling temperature, water supply temperature of the chiller, and outdoor loading and wet-bulb temperatures. Second, add the coefficient of the same variable to obtain the total power consumption equation for the chiller and cooling tower. The result shows the relationships of power consumption with water cooling temperature under identical conditions of the water cooling temperature, water supply temperature of chiller, and outdoor loading and wet-bulb temperatures. Finally, use the differential method to determine the optimal water cooling temperature.
C. L. Chen and Y. C. Chang, "Power Consumption Saving of Chiller Water System for Semiconductor Factory in Taiwan", Advanced Materials Research, Vols. 314-316, pp. 1492-1501, 2011