Experimental Research of Electrochemical Mechanical Polishing (ECMP) for Micro Tool Electrode

Abstract:

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The mechanism of the elctrochemical mechanical polishing (ECMP) technology for micro tool electrode was investigated. In this paper, suitable major process parameters on the surface quality were evaluated, the major parameters contains electrical parameters, machining gap, the working fluid and other factors. In quantitative analyses, the process of the ECMP technology were conducted. The roughness of the workpiece was reduced from a relatively high value to a mirror effect.

Info:

Periodical:

Advanced Materials Research (Volumes 314-316)

Edited by:

Jian Gao

Pages:

1846-1850

DOI:

10.4028/www.scientific.net/AMR.314-316.1846

Citation:

S. Guo et al., "Experimental Research of Electrochemical Mechanical Polishing (ECMP) for Micro Tool Electrode", Advanced Materials Research, Vols. 314-316, pp. 1846-1850, 2011

Online since:

August 2011

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Price:

$35.00

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