Microfabrication of Sandwich Micro-Transformers

Abstract:

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A new planar micro-transformer having sandwich spiral coil structure is fabricated using MEMS micro-fabrication technique. Stack interwinding coil is designed to achieve high coupling and higher winding number at relatively small coil area. In this work, stack sandwich interwinding coil structure is fabricated by bonding the substrates of the coil at connection pads using conductive epoxy material. This method replaces the use of conventional via connections that cause the most problem of current conductance in planar structures. The inductance of fabricated coil are measured at wide range of operating frequency using cascade GSG probe. The results show that the proposed technique is an alternative way in fabricating a simple and cost effective 3-dimensional structure of stack micro-transformer.

Info:

Periodical:

Advanced Materials Research (Volumes 314-316)

Edited by:

Jian Gao

Pages:

1836-1840

DOI:

10.4028/www.scientific.net/AMR.314-316.1836

Citation:

J. Yunas and Y. M. Burhanuddin, "Microfabrication of Sandwich Micro-Transformers", Advanced Materials Research, Vols. 314-316, pp. 1836-1840, 2011

Online since:

August 2011

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Price:

$35.00

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