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Thermal Analysis of Laser Irradiation of Fused Silica

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Abstract:

To grind fused silica in ductile mode, surface and subsurface micro cracks (SSMC) on ground fused silica should be repaired by CO2 laser irradiation before ultra-precision grinding. In this paper, 2D thermal analysis of single pass laser irradiation of fused silica was conducted, and the simulation results were discussed by comparing with the experiment results. To repair SSMC and decrease the surface roughness of ground fused silica simultaneously, the maximum temperature on the surface during laser irradiation should be controlled higher than 3280 K and lower than 3550 K.

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Advanced Manufacturing Technology, ADME 2011 View Preview

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Periodical:

Advanced Materials Research (Volumes 314-316)

Pages:

1960-1964

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.314-316.1960

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Online since:

August 2011

Authors:

Peng Yao, Ya Dong Gong, Suo Xian Yuan, Tian Feng Zhou, Ji Wang Yan, Tunemoto Kuriyagawa

Keywords:

CO2 Laser Irradiation, Fused Silica, Repair, Single Pass Scan, Surface and Subsurface Micro Cracks (SSMC), Thermal Analysis

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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