Vibration finishing which is often applied to the metal surfaces recently is the finishing method using a disk-type finishing tool with movements of rotational and orbital motion . However, an application of this finishing method and an evaluation of finished surfaces require skills and sensory examinations. This is because the relations between finishing conditions and quality of finished surfaces are not clear. In recent years, image processing methods for evaluating finished surface roughness and texture analysis were proposed [2 - 5]. However, quantitative evaluation has not been fully done.