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Influence of Pulsed-DC Power Frequency on Mechanical Properties and High Speed Drilling Application of a-C:H:Zr-x Coatings

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Abstract:

The a-C:H:Zr-x coatings are deposited on micro-drills using a closed field unbalanced magnetron (CFUBM) sputtering system with pulsed-DC power frequencies in the range 30 kHz to 110 kHz (the x in the term a-C:H:Zr-x is the frequency varied in the deposition process). The hardness of the various coatings is systematically explored. Additionally, the machining performance of the coated micro-drills is investigated by conducting high-speed through-hole drilling tests utilizing Printed Circuit Board (PCB) specimens. The experimental results reveal that the a-C:H:Zr-70 coating has the highest hardness (42 GPa), while the a-C:H:Zr-110 coating has the lowest hardness (26 GPa). In addition, it is shown that the a-C:H:Zr-70 coating increases the life of the micro-drill by a factor of three compared to that of an uncoated micro-drill.

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Periodical:

Advanced Materials Research (Volumes 328-330)

Pages:

861-867

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.328-330.861

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Online since:

September 2011

Authors:

Wen Hsien Kao, Yean Liang Su, Sun Hui Yao, S.H. Liu

Keywords:

a-C:H:Zr Coating, Micro-Drill, Pulsed DC

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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