Shock Analysis on Dual-Mass Silicon Micro-Gyroscope

Yun Fang Ni; Hong Sheng Li; Li Bin Huang; Bo Yang

doi:10.4028/www.scientific.net/AMR.338.401

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 338Shock Analysis on Dual-Mass Silicon...

Shock Analysis on Dual-Mass Silicon Micro-Gyroscope

Abstract:

Survivability in shock environment is an important reliability index of silicon micro-gyroscope. Shock response of dual-mass silicon micro-gyroscope is investigated in this paper. A lumped mass model was established for the micro-gyroscope based on the characteristics of the dual-mass structure. Analytic solution to the response of the structure under shock load in a half-sine acceleration form was then acquired. The analytic solution was applied to calculate the shock response of a well designed dual-mass silicon micro-gyroscope in our laboratory, while the correctness of it was verified with finite element method (FEM) in ANSYS. The analytic solution is serviceable in reliability prediction of dual-mass silicon micro-gyroscope in shock environment.

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Periodical:

Advanced Materials Research (Volume 338)

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401-405

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.338.401

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Online since:

September 2011

Authors:

Yun Fang Ni, Hong Sheng Li, Li Bin Huang, Bo Yang

Keywords:

ANSYS, Dual-Mass, Shock Response, Silicon Micro-Gyroscope

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