Shock Analysis on Dual-Mass Silicon Micro-Gyroscope
Survivability in shock environment is an important reliability index of silicon micro-gyroscope. Shock response of dual-mass silicon micro-gyroscope is investigated in this paper. A lumped mass model was established for the micro-gyroscope based on the characteristics of the dual-mass structure. Analytic solution to the response of the structure under shock load in a half-sine acceleration form was then acquired. The analytic solution was applied to calculate the shock response of a well designed dual-mass silicon micro-gyroscope in our laboratory, while the correctness of it was verified with finite element method (FEM) in ANSYS. The analytic solution is serviceable in reliability prediction of dual-mass silicon micro-gyroscope in shock environment.
Xiaodong Zhang, Zhijiu Ai, Prasad Yarlagadda and Yun-Hae Kim
Y. F. Ni et al., "Shock Analysis on Dual-Mass Silicon Micro-Gyroscope", Advanced Materials Research, Vol. 338, pp. 401-405, 2011