Preparation of Porous Alumina Abrasives with Different Morphologies and their Chemical Mechanical Polishing Behavior

Abstract:

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The traditional solid alumina abrasive has been widely used in commercial slurries. But it is easy to cause polishing scratches due to its dense solid structure. The morphology of the abrasives can also impact on the chemical mechanical polishing (CMP) performances. To improve the CMP performances of the hard disk substrate, rods-like porous alumina and flower-like porous alumina abrasives were prepared and their chemical mechanical polishing behavior investigated. The results showed that the porous alumina abrasives with different morphologies exhibited lower topographical variations and surface roughness than solid alumina abrasives under the same testing conditions.

Info:

Periodical:

Edited by:

Xiaodong Zhang, Zhijiu Ai, Prasad Yarlagadda and Yun-Hae Kim

Pages:

415-420

DOI:

10.4028/www.scientific.net/AMR.338.415

Citation:

X. Wu et al., "Preparation of Porous Alumina Abrasives with Different Morphologies and their Chemical Mechanical Polishing Behavior", Advanced Materials Research, Vol. 338, pp. 415-420, 2011

Online since:

September 2011

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Price:

$35.00

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