Design and Fabrication of Planar-Type Micro-Hotplate with Si-Island Gas Sensor

Bin Zhu; Chen Bo Yin; Zi Li Zhang; Chun Min Tao; Ning Ning Dong

doi:10.4028/www.scientific.net/AMR.345.23

Paper Titles

Preface and Committees

Probing Near-Infrared Quantum Dots for Imaging and Biomedical Applications
p.3

Toxicological Mechanisms of Carbon-Based Nanomaterials
p.12

3-D Dynamic Analysis for Functionally Graded Material Plates with Different Openings
p.18

Design and Fabrication of Planar-Type Micro-Hotplate with Si-Island Gas Sensor
p.23

Applications of Quantum Dots in Cancer Research
p.29

Numerical Simulation and Performance Optimization of the Gain Characteristic of EY-CDWA Optical Waveguide Amplifier
p.35

Analytical Hierarchy Process Model Applied to Port Urban Logistics Efficiency Commentary
p.41

Dynamic Modeling and Vibration Control of a Space Flexible Manipulator Using Piezoelectric Actuators and Sensors
p.46

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 345Design and Fabrication of Planar-Type...

Design and Fabrication of Planar-Type Micro-Hotplate with Si-Island Gas Sensor

Abstract:

A gas sensor with planar-type micro-hotplate (MHP) with Si-island was designed and fabricated in this paper. The sensor was fabricated simply by using only three masks for the lithography process. The temperature distribution across the sensitive film was simulated and analyzed using ANSYS. A uniform temperature distribution was obtained after added Si-island. The SnO₂ sensitive film was deposited through sol-gel spin-coating method and showed reasonable gas-sensing properties to hydrogen at 300°C.

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Periodical:

Advanced Materials Research (Volume 345)

Pages:

23-28

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.345.23

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Online since:

September 2011

Authors:

Bin Zhu, Chen Bo Yin, Zi Li Zhang, Chun Min Tao, Ning Ning Dong

Keywords:

Gas Sensor, Planar-Type, Power Consumption, Si-Island, Temperature Distribution

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