The Piezoelectric Constant Testing System Based on the Principle of Laser Scanning Fabry-Perot Interferometer

Yue Tong; Zheng Rong Xia; Jian Guo Ma; Xiao Yong Lu

doi:10.4028/www.scientific.net/AMR.346.539

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 346The Piezoelectric Constant Testing System Based on...

The Piezoelectric Constant Testing System Based on the Principle of Laser Scanning Fabry-Perot Interferometer

Abstract:

The principles of measuring tiny deformation by scanning Fabry-Perot interferometer have been studied. The measuring method of piezoelectric constant testing based on laser scanning Fabry-Perot principle was proposed. This measuring method was verified through contrasting the measured values with the known ones of piezoelectric constant and the result showed the errors between them were less than 6%

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Periodical:

Advanced Materials Research (Volume 346)

Pages:

539-545

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.346.539

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Online since:

September 2011

Authors:

Yue Tong, Zheng Rong Xia, Jian Guo Ma, Xiao Yong Lu

Keywords:

Piezoelectric Constant, Scanning Fabry-Perot Interferometer, Tiny Deformation

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