Abatement of CF₄ and Associated Gas (NOx) with Combined Microwave Plasma and TiO₂ Catalyst

Abstract:

The atmospheric-pressure microwave plasma can remove perfluorocompounds (PFCs) efficiently, which have long lifetime and serious global warming implications. However, associated gases such as NOx are produced in the abatement process of PFCs. In order to destroy PFCs and NOx pollutants, TiO₂ catalyst is introduced into the abatement system. The effective TiO₂ catalysts are prepared by a sol-gel method with the ratio of tetrabutyl titanate, ethanol, H₂O and acetic acid = 1: 7: 1: 0.4. The abatement of CF₄ and associated gas (NOx) is carried out with combined microwave plasma and TiO₂ catalyst. The results show that the combined microwave plasma and catalyst abatement system can be successfully used to remove CF₄ and NOx. The destruction and removal efficiency of CF₄ and NOx were higher with the combined catalyst and plasma process than that with catalyst or plasma only.

• Periodical: Advanced Materials Research (Volumes 356-360)
• Pages: 1346-1349
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.356-360.1346
• Online since: October 2011
• Authors: Xiao Mei Zhu, Bing Sun, Hong Duan Xie, Lian Zheng Zhang, Jia Ni Zhao
• Keywords: Microwave Plasma, NO_x, PFCs, Synergy, TiO₂ Catalyst

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