Mechanical Properties of Nano-Indentation of Diamond Coating in Infrared Window

Hong Xiang Wang; Dun Wen Zuo; Chun Xu

doi:10.4028/www.scientific.net/AMR.381.104

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 381Mechanical Properties of Nano-Indentation of...

Mechanical Properties of Nano-Indentation of Diamond Coating in Infrared Window

Abstract:

Diamond coatings were prepared on mono-crystalline silicon by hot filament chemical vapor deposition (HFCVD). Hardness, elastic modulus and other mechanical properties of the diamond were analyzed by nanoindenter. The results showed that the process parameters such as chamber pressure, substrate temperature, methane volume ratio have a greater impact on the mechanical properties of the diamond coating. The micro-hardness and elastic modulus of the coating would both decrease with too high or too low substrate temperature, chamber pressure or volume ratio of methane. The results showed that when the substrate temperature is 750°C, champer pressure is 2.5kPa and methane volume ratio is 2%, the diamond coatings have high micro-hardness and elastic modulus.

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Periodical:

Advanced Materials Research (Volume 381)

Pages:

104-108

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.381.104

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Online since:

November 2011

Authors:

Hong Xiang Wang, Dun Wen Zuo, Chun Xu

Keywords:

Coating, CVD Diamond, Elastic Modulus, Microhardness

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References

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