Research on Character of Integrated Quartz Crystal Resonators

Abstract:

The force sensitive characteristic of integrated quartz crystal resonator assembled on one quartz crystal substrate with a certain radial direction force are studied, and it is also studied that the force sensitive characteristic of output frequency which is the mixing frequency by resonant frequency corresponded to the resonators in the different position of the same quartz crystal wafer outputted in difference frequency way. The research result shows the force sensitive characteristic of AT-cut integrated three-electrode quartz crystal resonator outputted in difference frequency way is 1.3 times of that of the traditional single-electrode resonator. The force sensitive characteristic of the integrated four-electrode resonator is a little bit smaller, but two sets of output can be obtained at the same time. The frequency stability of all integrated quartz resonator can get to the magnitude of 10-10 and relative frequency variation is about ±5ppm in the range of -50°C to 60°C.

• Periodical: Advanced Materials Research (Volume 382)
• Pages: 159-162
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.382.159
• Online since: November 2011
• Authors: Wen Jie Tian, You Bin Sun, Hong Yun Zhou, Gui Feng Dong
• Keywords: Force Characteristic, Frequency Stability, Quartz Resonator, Temperature Characteristic

References

[1] Wang Zheyao, Zhu Huizhong, Dong Yonggui, etal. Force-Frequency Coefficient of Symmetrical Incomplete Circular Quartz Crystal Resonator[J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2001, 48(5): 1471- 1479.

DOI: 10.1109/58.949758

[2] Liu Jiehua, Zhang Qishan, Yang Jun, etal. Research on Measurement Instrument with High Frequency and Precision for Electric Parameters of Quartz Crystal Units[J] . Chinese Journal of Scientific Instrument. 2006, 27(5): 447-449.

[3] E.D. REEDY. JR, W.J. KASS. Finite-Element Analysis of a Quartz Digital Accelerometer [J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 1990, 37(5): 132-137.

DOI: 10.1109/58.105253

[4] Wang Zheyao. Effect of transverse force on the performance of quartz resonator force sensors [J]. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2004, 51(4): 470~476.

DOI: 10.1109/tuffc.2004.1295433

[5] Feng guanping, Wang xiaohong, Wang jinsong. Review of Stress-Frequency Effect of Quartz Crystal Resonators and Its Applications [J]. Journal of Tsinghua University (Sci & Tech), 1998, 38(8): 35~38.

[6] Zhang Jingwen , Liang Dakai , Xu Minghui . Digital Force Measuring System Based on Quartz Resonance Force Sensor[J] CHINESE JOURNAL OF SENSORS AND ACTUATORS. 2005, 18(1): 98-100.

[7] B.B. Малов, Piezoelectric Resonance Sensors [M]. (Shanchen Weng). Beijing: national defense industrial publishing company, 1984: 1-237.

[8] Tian Wenjie, Liu Lingling, Lu Junling. The Characteristics of the Shear-Vibrating Quartz Crystal Resonator[J]. RARE METAL MATERIALS AND ENGINEERING. 2006. 35（suppl. 3）627～629.