Paper Titles
Simulation and Research on Double Cylinder Hydraulic System Synchronized Control for Segment Erector of TBM
p.2103
Real-Time Optimization of Transportation System for Earth-Rock Filled Dam Construction with GPS-Based Monitoring System
p.2108
Salient Pole Force Analysis and Inhibition of Tubular Permanent Magnet Linear Synchronous Motor
p.2116
Modeling and Simulation of Propeller and Hull System for Marine Propulsion Plant
p.2121
Design of Coarse-Fine Combined Synchronization Control System for Lithography Based on Cross-Coupled Sliding Mode Control
p.2126
Internal Model Control of Three-Phase Four-Leg Active Power Filter Based on Online LS-SVM ANN Inverse System Method
p.2132
Research on Stability of Networked Control System with Uncertain Time-Varying Delays
p.2138
An Improved Z-Source Boost-Buck Rectifier Topology with Lower DC Output Voltage
p.2145
Fuzzy Hierarchy Comprehensive Evaluation on Dam-Break Risk Analysis
p.2151

Design of Coarse-Fine Combined Synchronization Control System for Lithography Based on Cross-Coupled Sliding Mode Control

Article Preview

Abstract:

In order to achieve high position precision and synchronization between the wafer stage and the reticle stage, a cross-coupled sliding mode control scheme for a coarse-fine combined synchronization servo system of lithography is proposed. To accomplish high bandwidth and high tracking precision, a conventional linear motor is combined with a voice coil motor as a coarse-fine dual-stage control system. A cross-coupled structure is presented to decrease the synchronization error during scanning operation. Sliding mode control law is designed based on the control error and the synchronization error. Simulation results show that the synchronization error and the control error have the same order of magnitude, and the dynamic performance of the control system satisfies the design requirement.

You might also be interested in these eBooks
Manufacturing Science and Technology, ICMST2011 View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 383-390)

Pages:

2126-2131

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.383-390.2126

Citation:

Cite this paper

Online since:

November 2011

Authors:

Zhi Pen Wu, Xing Lin Chen

Keywords:

Coarse-Fine Control, Lithography, Sliding Mode Control (SMC), Synchronization Error

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2012 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] M. Claassen, M. Reuhman, and A. Loock, Dynamic performance of DUV step&scan systems and process latitude, in Proc. SPIE, vol, 4000, p.776–784, (2000).

DOI: 10.1117/12.389070

Google Scholar

[2] E. Luce, S. Mougel, and P.J. Goirand, Impact of synchronization errors on overlay and CD control, in Proc. SPIE, vol, 4691, p.840–852, (2002).

DOI: 10.1117/12.474634

Google Scholar

[3] M. Tomizuka, J. S. Hu, and T. C. Chin, Synchronization of two motion control axes under adaptive feedforward control, ASME J. Dyn. Sys., Meas., Control, vol. 114, no. 2, p.196–203, (1992).

DOI: 10.1115/1.2896515

Google Scholar

[4] T. Miyoshi, K. Terashima, and Y. Maki, Optimum synchronous control for multiple-axis servo systems in terms of time-varying performance index, in Proc. 26th Annual Conference of the IEEE, San Francisco, vol. 2, p.1080–1086, (2000).

DOI: 10.1109/iecon.2000.972273

Google Scholar

[5] S. J. Schroeck and W. C. Messner, On compensator design for linear time-invariant dual-input single-output system, IEEE Trans. Magnetics, vol. 6, p.50–57, Mar. (2001).

DOI: 10.1109/3516.914391

Google Scholar

[6] M. F. Heertjes, X. G. P. Schuurbiers, and H. Nijmeijer, Performance-improved design of N-PID controlled motion systems with applications to wafer stages, IEEE Trans. Ind. Electron., vol. 56, no. 5, p.1347–1355, (2009).

DOI: 10.1109/tie.2009.2012420

Google Scholar

[7] Y. H. Kim and S. H. Lee, An Approach to Dual-Stage Servo Design in Computer Disk Drives, IEEE Trans. Contr. Syst. Technol., vol. 12, no. 1, p.12–20, (2004).

DOI: 10.1109/tcst.2003.819591

Google Scholar

[8] S. H. Lee, Optimal Sliding Mode Dual-Stage Actuator Control in Computer Disk Drivest, ASME J. Dyn. Sys., Meas., Control, vol. 132, pp.041003-1–041003-9, (2010).

DOI: 10.1115/1.4001325

Google Scholar

[9] G. Herrmann, C. Edwards, and B. Hredzak, Application of a discrete sliding mode technique to a HDD dual-stage track-seek and track-following servo system, in Proc. 22nd IEEE Int. Conf. Symposium on Intelligent Contr., Singapore, Oct. 1–3, 2007, p.283.

DOI: 10.1109/isic.2007.4450899

Google Scholar

[10] R. Shahnazi, H. M. Shanechi, and N. Pariz, Position Control of Induction and DC Servomotors: A Novel Adaptive Fuzzy PI Sliding Mode Control, IEEE Trans. Energy Convers., vol. 23, no. 1, p.138–147, (2008).

DOI: 10.1109/tec.2007.905070

Google Scholar