Sustainability is becoming an important tool towards our better future. More and more companies are looking into sustainability as their prime focus. Sustainability encompasses responsibilities towards social, energy, water, pollution and economic factors. Sustainability is the ability to sustain. Sustainability Index evaluation criteria and checklist has been created for a typical semiconductor manufacturing industries and the sustainability index has been compared with similar industry. Based on the benchmarking conducted for two plants one of them ranked at 75% indicating high on sustainability index. Benchmarking on sustainability index is a useful measure for shareholders, customers and employees.