Research on MEMS Phthalocyanine-Based Gas Sensor

Abstract:

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A gas sensor based on MEMS (microelectro-machine system) has been developed to provide a sensitive means of detecting nitrogen dioxide. The structure, configuration and fabrication steps were described. The sensor was copper phthalocyanine (CuPc) films which caused a resistance change upon exposure to nitrogen dioxide. The sensor demonstrated a good response and recovery time about 4s and 7s separately. Results also indicate to be accordance with the sensitive mechanism of CuPc in terms of semiconductor theory.

Info:

Periodical:

Advanced Materials Research (Volumes 383-390)

Edited by:

Wu Fan

Pages:

6856-6860

DOI:

10.4028/www.scientific.net/AMR.383-390.6856

Citation:

X. Liu "Research on MEMS Phthalocyanine-Based Gas Sensor", Advanced Materials Research, Vols. 383-390, pp. 6856-6860, 2012

Online since:

November 2011

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Price:

$35.00

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