Research on MEMS Phthalocyanine-Based Gas Sensor

Xin Liu

doi:10.4028/www.scientific.net/AMR.383-390.6856

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 383-390Research on MEMS Phthalocyanine-Based Gas Sensor

Research on MEMS Phthalocyanine-Based Gas Sensor

Abstract:

A gas sensor based on MEMS (microelectro-machine system) has been developed to provide a sensitive means of detecting nitrogen dioxide. The structure, configuration and fabrication steps were described. The sensor was copper phthalocyanine (CuPc) films which caused a resistance change upon exposure to nitrogen dioxide. The sensor demonstrated a good response and recovery time about 4s and 7s separately. Results also indicate to be accordance with the sensitive mechanism of CuPc in terms of semiconductor theory.

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Periodical:

Advanced Materials Research (Volumes 383-390)

Pages:

6856-6860

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.383-390.6856

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Online since:

November 2011

Authors:

Xin Liu

Keywords:

Gas Sensor, Micro-Electromechanical System (MEMS), No₂

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References

[1] Duk-Dong Lee, Nak-Jin Choi, Kap-Duk Song, Micro Gas Sensor Array for Monitoring Highly Toxic Gases, Rare Metal Materials and Engineering, 2006, p.9–12.

DOI: 10.1109/sensor.2003.1215368

Google Scholar

[2] HUANG Xiao-ying; LI Juan; WAN Zhong-hua; SONG Li-hong, Air Quality Assessment for Shenzhen City based on Pollution Harm Index Method, Environment and Ecology in the Three Gorges, 2009, vol4, p.26–29.

Google Scholar

[3] N. Nakano, Development of a monitoring tape for nitrogen dioxide in air, Analytica Chimica Acta, 1996, p.41–45.

DOI: 10.1016/0003-2670(95)00560-9

Google Scholar

[4] Su Ming, Li Shuyou, Vinayak P. Dravid. Journal of American Chemistry Society, 2003, vol. 125, p.9930–9931.

Google Scholar

[5] LI Ke, YU Shi-jie, YOU Zheng, ZHAO Jia-hao, Transducer and Microsystem Technologies, Transducer and Microsystem Technologies, 2008, p.5–7.

Google Scholar

[6] Ji Zhengguo, Xiang Yin, Zhu Ling, Wang Longcheng, Rui Xiangxin, Enhancing Selectivity of Sensor by the Gas Sensor Made of Lead Phthalocyanine and Its Transient Response, Vacuum Electronics, 2002, p.30–32.

Google Scholar