Research on MEMS Phthalocyanine-Based Gas Sensor
A gas sensor based on MEMS (microelectro-machine system) has been developed to provide a sensitive means of detecting nitrogen dioxide. The structure, configuration and fabrication steps were described. The sensor was copper phthalocyanine (CuPc) films which caused a resistance change upon exposure to nitrogen dioxide. The sensor demonstrated a good response and recovery time about 4s and 7s separately. Results also indicate to be accordance with the sensitive mechanism of CuPc in terms of semiconductor theory.
X. Liu "Research on MEMS Phthalocyanine-Based Gas Sensor", Advanced Materials Research, Vols. 383-390, pp. 6856-6860, 2012