Preparation of TiO₂ Nanometer Thin Film Deposited on Organic Templates by a Layer-by-Layer Self-Assembly Method

Abstract:

Thin organic layer-by-layer self-assembly films with negatively charged surface were prepared, which used as templates for the deposition of TiO₂ on Si substrate by hydrolysis of titanate solution in acid environment. The as-deposited thin films were fully amorphous from the result of XRD, also were homogeneous and continuous produced at 80 °C for 2 h as presented in SEM images. The thickness of thin films grew with deposition time gradually and reached 300 nm after 12 h immersion.

• Periodical: Advanced Materials Research (Volumes 391-392)
• Pages: 432-436
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.391-392.432
• Online since: December 2011
• Authors: Wen Ning Mu, Shuang Zhi Shi, Xiu Yu Yang
• Keywords: Layer-by-Layer Deposition, Self-Assembly Method, Thin Film, TiO₂

References

[1] R. Weinberger and R.B. Garber: Appl. Phys. Lett. Vol. 66 (1995), p.2409.

[2] S.S. Lin, Y.H. Hung and S.C. Chen: Thin Solid Films Vol. 517 (2009), p.4621.

[3] D. Manno, G. Micocci, R. Rella, A. Serra, A. Taurino and A. Tepore: J. Appl. Phys. Vol. 82 (1997), p.54.

[4] Z. Wang and X. Hu: Thin Solid Films Vol. 352 (1999), p.62.

[5] J.X. Liu, D.Z. Yang, F. Shi and Y.J. Cai: Thin Solid Films Vol. 429 (2003), p.225.

[6] H.S. Yun, K.C. Miyazawa, I. Honma, H.S. Zhou and M. Kuwabara: Mater. Sci. Eng. Vol. 23 (2003), p.487.

[7] A. Mills, N. Elliott, I.P. Parkin, S.A. O'Neill and R.J. Clark: J. Photochem. Photobiol. A: Chem. Vol. 151 (2002), p.171.

[8] T. Fujii, N. Sakata, J. Takada, Y. Miura, Y. Daitoh and M. Takano: J. Mater. Res. Vol. 9 (1994), p.1468.

[9] M.R. Teresa Viseu and M.I.C. Ferreira: Vacuum Vol. 52 (1999), p.115.

[10] L. Miao, P. Jin, K. Kaneko, A. Terai, N. Nabatova-Gabain and S. Tanemura: Appl. Surf. Sci. Vol. 212-213 (2003), p.255.

DOI: 10.1016/s0169-4332(03)00106-5

[11] M. Gilo and N. Croitoru: Thin Solid Films Vol. 283 (1996), p.84.

[12] J. Aarik, A. Aiala, A.A. Kiisler, T. Uustare and V. Sammelselg: Thin Solid Films Vol. 305 (1997), p.270.

DOI: 10.1016/s0040-6090(97)00135-1

[13] H.S. Yoon, S.K. Kim, H.S. Im and B. Kor: Chem. Soc. Vol. 18 (6) (1997), p.641.

[14] A. Bendavid, P.J. Martin and H. Takikawa: Thin Solid Films Vol. 360 (2000), p.241.

[15] J.H. Kim, S. Fujita and S. Shiratori: Thin Solid Films Vol. 499 (2006), p.83.

[16] A.O.T. Patrocínio, L.G. Paterno and N.Y. Murakami Iha: Journal of Photochemistry and Photobiology A: Chemistry Vol. 205 (2009), p.23.

[17] J. Ma, Y. Jia, Y. Jing, Y. Yao and J. Sun: Applied Clay Science Vol. 47 (2010), p.433.

[18] K.J. Seu, A.P. Pandey, F. Haque, E.A. Proctor, A.E. Ribbe and J.S. Hovis: Biophys. J. Vol. 92 (2007), p.2445.