A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing

Farooq Ahmad; John Ojur Dennis; Mohd Haris Md Khir; Nor Hisham Hamid

doi:10.4028/www.scientific.net/AMR.403-408.4205

Paper Titles

An Error Analysis on Images Using Skeletonization Methods
p.4184

An Adaptive Protection Method for Power System under Wide Area Networks
p.4189

Design of SEMG Recognition System
p.4194

Design and Simulation a Low Voltage Actuated RF MEMS Switch with Improve RF Characteristics
p.4199

A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing
p.4205

Flood Submergence Processes Simulation Based on Virtual Reality
p.4210

Optimization Design and Motion Simulation of Offset Slider-Crank Mechanism
p.4216

Study on Design for Rolling Die of Feed Granulator
p.4221

Numerical Study of Large Defection of Functionally Graded Beam with Geometry Nonlinearity
p.4226

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 403-408A CMOS MEMS Resonant Magnetic Field Sensor with...

A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing

Abstract:

This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is robust against the interference from other sources during transmission. At damping ratio of 0.0001, resonant frequency of the comb resonator is 4.35 kHz with quality factor 5000 and amplitude 18.45 μm. Sensitivity of the device towards external magnetic field is 9.455 mHz/nT which is 10,000 times improved than recently published data.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 403-408)

Pages:

4205-4209

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.403-408.4205

Citation:

Cite this paper

Online since:

November 2011

Authors:

Farooq Ahmad, John Ojur Dennis, Mohd Haris Md Khir, Nor Hisham Hamid

Keywords:

CMOS MEMS Resonators, Comb Drive Actuator, Deep Reactive Ion Etching (DRIE), Differential Capacitive Sensing, Magnetic Sensors

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] J. Lenz, A.S. Edelstein, Magnetic sensors and their applications, IEEE Sensors J. 6 (2006) 631–649.

DOI: 10.1109/jsen.2006.874493

Google Scholar

[2] R.S. Popovic, Hall Effect Devices, 2nd ed., Institute of Physics Publishing, Bristol, UK, (2004).

Google Scholar

[3] Z. Kádár, A. Bossche, P.M. Sarro, J.R. Mollinger, Magnetic-field measurements using an integrated resonant magnetic-field sensor, Sens. ActuatorsA70 (1998) 225–232.

DOI: 10.1016/s0924-4247(98)00143-5

Google Scholar

[4] H. Emmerich, M. Schöfthaler, Magnetic field measurements with a novel surface micromachined magnetic-field sensor, IEEE Trans. Electron Dev. 47 (2000) 972–977.

DOI: 10.1109/16.841228

Google Scholar

[5] Tucker, J.; Wesoleck, D.; Wickenden, D. An integrated CMOS MEMS xylophone magnetometer with capacitive sense electronics. In 2000 NanoTech, Houston, Texas, USA, 9-12 September 2000, AIAA 2002-5723.

DOI: 10.2514/6.2002-5723

Google Scholar

[6] Bahreyni, B. Design, Modeling, Simulation, and Testing of Resonant Micromachined Magnetic Field Sensors. Ph. D. Thesis, University of Manitoba, Winnipeg, Canada, (2006).

Google Scholar

[7] F . Ahmad, J.O. Dennis, N. H. Hamid and M.H.M. Khir, Design and Modeling of MEMS Resonator for Magnetic Field Sensing using hybrid actuation technique, IEEE APCCAS 2010, pp.827-830, December 6 – 9, (2010).

DOI: 10.1109/apccas.2010.5775024

Google Scholar

[8] F . Ahmad, J.O. Dennis, N. H. Hamid and M.H.M. Khir, Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields, IEEE-RSM 2011, in press, September 27 – 29, (2011).

DOI: 10.1109/rsm.2011.6088350

Google Scholar