A Theoretical and Experimental Study on Temperature Dependent Characteristics of Silicon MEMS Gyroscope Drive Mode

Abstract:

The prototype of the silicon micro gyroscope is introduced. Temperature is the key factor that affects the performance of the gyroscope. In this paper, temperature dependent characteristics of silicon micro gyroscope drive mode is analyzed. The theoretical results show that temperature coefficient of the Young’s modulus is the most critical factor that affects temperature characteristics of the silicon micro gyroscope’s drive modal frequency and the frequency is proportional to the temperature. The results are verified by finite element simulations. The silicon micro gyroscopes are experimented in a high accurate thermostat. The drive modal frequency and temperature are measured and sampled. These experimental results show that the temperature coefficient of Young’s modulus is the key factor and the frequency is proportional to the temperature. The theoretic analyses are also validated by the experiments.

• Periodical: Advanced Materials Research (Volumes 403-408)
• Pages: 4237-4243
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.403-408.4237
• Online since: November 2011
• Authors: Rui Feng, An Ping Qiu, Qin Shi, Yan Su
• Keywords: Drive Modal Frequency, Silicon Micro Gyroscope, Temperature Characteristics

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