A Micro-Machined Silicon Vibrating Ring Gyroscope

Rui Xue Zhang; Zhi Yong Chen; Rong Zhang

doi:10.4028/www.scientific.net/AMR.403-408.4244

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 403-408A Micro-Machined Silicon Vibrating Ring Gyroscope

A Micro-Machined Silicon Vibrating Ring Gyroscope

Abstract:

The presented work focuses on the design, fabrication and frequency characteristics of a multi-mass MEMS vibrating ring gyroscope. After modal and harmonic simulation in ANSYS, the first 12 modes’ resonant frequencies and impacts on the sense-axis displacement are obtained. This gyroscope is fabricated through the silicon-on-glass process and deep etching bulk silicon MEMS technology. With a view to obtain the frequency characteristics, the authors attempt set of frequency sweeping experiment, whose record agrees well with ANSYS simulation results. The preliminary experimental data present the relationship between drive voltage and resonant characteristics and indicate that the structural design of vibrating ring and multi-mass can effectively depart the operational modes away from the interfering modes with a higher Q of sense axis at atmospheric pressure.

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Periodical:

Advanced Materials Research (Volumes 403-408)

Pages:

4244-4251

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.403-408.4244

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Online since:

November 2011

Authors:

Rui Xue Zhang, Zhi Yong Chen, Rong Zhang

Keywords:

Frequency Characteristic Introduction, MEMS Gyroscopes, Multi-Mass, Vibrating Ring

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