Enhancing the Output Power of Vibration Based Electrostatic MEMS Energy Converters for Energy Scavenging Systems

Abstract:

This paper introduces three methods to increase the output power of the vibration based electrostatic MEMS energy converters. This will be done by taking the effect of the parallel capacitance of the converter in the output power equation. In addition the output power of the converter will be increased by two other ways: Firstly, by depositing dielectric materials on the sidewalls of the converter fingers, secondly, by increasing the converter thickness. In addition the output power will be increased to an optimum value by combining the effect of increasing the device thickness and depositing dielectric materials on the sidewalls of the converter fingers.

• Periodical: Advanced Materials Research (Volumes 403-408)
• Pages: 4545-4550
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.403-408.4545
• Online since: November 2011
• Authors: Marwa S. Salem Basyoni, A.A. Zekry, H. F. Ragai
• Keywords: Electrostatic MEMS Energy Converter, Output Power, Parallel Capacitance

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