Fabrication and Test of Electrostatic MEMS Converter Found in Energy Scavenging Systems

Abstract:

This paper introduces the steps for fabricating an electrostatic MEMS converter found in energy scavenging systems. The fabrication carried out at Rensselaer Polytechnic Institute (RPI) clean room, Troy, New York, USA. The testing results for the fabricated converter are presented. The main objective of fabricating and testing the electrostatic MEMS converter is to verify the new idea of enhancing its output power by including the effect of its parallel capacitance in the output power equation.

• Periodical: Advanced Materials Research (Volumes 403-408)
• Pages: 4557-4563
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.403-408.4557
• Online since: November 2011
• Authors: Marwa S. Salem, Diana Borca Tasciuc, A.A. Zekry, H. F. Ragai
• Keywords: Electrostatic MEMS Converter, Energy Scavenging, Fabrication, Test

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