Micro-Machined Variable RF Capacitor Based on Glass Substrate

Abstract:

The RF applications like voltage controlled oscillators, tunable filters, resonators etc., requires variable capacitors in their design. This paper presents a novel micro variable capacitor consisting of fixed plate and moveable plate which is suspended by ‘S’ type springs. Micro variable capacitor can be electrostatically actuated via applied voltage to change the capacitance between the plates. The capacitance changes from15 pF to 22.5pF while applied voltage ranges from 0 to pull-in voltage. And micro variable capacitor based on glass Substrate was fabricated by simple micro electromechanical systems (MEMS) technology.

• Periodical: Advanced Materials Research (Volumes 418-420)
• Pages: 1729-1733
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.418-420.1729
• Online since: December 2011
• Authors: Ming Xuan He, Xin Lu, Xin Chen, Xing Ling, Yuan Li, Hong Wang, Gui Fu Ding
• Keywords: Glass Substrate, Micro-Electromechanical System (MEMS), Pull-In Voltage, RF, Variable Capacitors

References

[1] D. M Fang, X.M. Jing, P.H. Wang, Y.Z and X.L. Zhao: Microsystem Technologies Vol.14 (2008), p.397–402.

[2] N. J. R. Muniraj: Microsystem technologies Vol.17(2011), pp.31-33.

[3] P. Julien , N.Pierre , R.Lionel , M.Frederic, and L.GaA: Microsystem Technologies Vol.17(2011), pp.513-522.

[4] K.S. Ou , K.S. Chen, T.S. Yang and A.Y. Lee: Journal of micro electromechanical systems Vol. 20(2011), pp.527-537.

[5] S. Pamidighantam, R. Puers ,K. Baert and H.A.C. Tilmans : Journal of micromechanics and micro engineering Vol.12(2002), pp.458-464.

[6] D.M. Fang,S.Fu,Y.Cao,Y.Zhou and X.L. Zhao: Microelectronics Journal Vol.38 (2007) , p.855–859.

[7] S. Anurekha : IETE Journal of Research Vol.57(2011), pp.118-124.

[8] F.A. Boloni ,A. Benabou, A.Tounzi, A: Ieee transactions on magnetics Vol.47(2011), pp.974-977.

DOI: 10.1109/tmag.2010.2081355

[9] X.J.Li, L.J. Niu,R.Zhai and Q.Yin: Journal of detection&control Vol.32(2010).