The Primary Processing of MEMS Devices and Applications Analysis

Kai Chen; Li Qing Fang; Hong Kai Wang

doi:10.4028/www.scientific.net/AMR.418-420.2134

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 418-420The Primary Processing of MEMS Devices and...

The Primary Processing of MEMS Devices and Applications Analysis

Abstract:

This paper details the system of MEMS technology, focusing on analysis MEMS device processing and application status. Through the analysis of MEMS technology in the application of MEMS devices, MEMS devices described in the application of the status in modern life, while the survey data produced a MEMS device in the next few years the proportion of market share, and analyse the developments of MEMS devices and development trend.

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Materials Processing Technology, ICAMMP2011

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Periodical:

Advanced Materials Research (Volumes 418-420)

Pages:

2134-2138

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.418-420.2134

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Online since:

December 2011

Authors:

Kai Chen, Li Qing Fang, Hong Kai Wang

Keywords:

Application Status, Micro-Electromechanical System (MEMS), Processing, Trend

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