Systematic Direct Solid Modeling Approach for Surface Micromachined MEMS

Abstract:

Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices. In this paper, a systematic direct solid modeling approach for surface micromachined MEMS design is proposed. In this approach, practical model of a surface micromachined MEMS device, designed in a traditional CAD environment, is simplified firstly; after simplification, masks and process sequences are generated through solid-based mask synthesis; then local variation is used to refining the 3D layer model; finally masks and process sequences are verified in rough simulation and accurate simulation. The approach aims at enabling designers to focus on creative design activity in an intuitive mode.

• Periodical: Advanced Materials Research (Volumes 433-440)
• Pages: 3130-3137
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.433-440.3130
• Online since: January 2012
• Authors: Jian Hua Li, Yu Sheng Liu, Hao Ling, Wei Bin Guo, Gao Qi He
• Keywords: CAD, Direct Solid Modeling, Micro-Electromechanical System (MEMS), Surface Micromachining

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