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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 445Investigation of Rotation Elastic Boundary...

Investigation of Rotation Elastic Boundary Condition on the Pull-In Instability of Electrostatic Torsional Actuators

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Abstract:

In this paper, the static pull-in instability of torsional nanoelectromechanical systems (NEMS) with coupling effect between torsion and bending is investigated considering the effect of translation elastic boundary condition. A set of normalized equations governing the static actuation properties of the torsional actuator is derived to demonstrate the relationships between the parameters of static characteristics, such as torsion angle, vertical displacement, and applied voltage. The results from this model demonstrated that the real model of boundary condition (elastic boundary condition) is very important issue which must be considered in manufacturing process.

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Materials and Manufacturing Technologies XIV

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Periodical:

Advanced Materials Research (Volume 445)

Pages:

1070-1075

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.445.1070

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Online since:

January 2012

Authors:

Kamyar Mahbobian, Y. Tadi Beni

Keywords:

Elastic Boundary Condition, Electrostatic Torsional Actuator, Pull-In Angle, Pull-In Displacement, Pull-In Voltage

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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