ZnO Thin Film Sensor Design of the Charge Amplifier

Abstract:

The ZnO film as the material, the charge amplifier and the accelerometer in one set, to record and display the measurement data directly, simplifying the testing system to improve the test accuracy and reliability. Charge amplifier circuit is designed to be simple, easy to debug, high integration, low cost, favorable ZnO thin films driven by the widespread use of the accelerometer.

• Periodical: Advanced Materials Research (Volume 462)
• Pages: 65-70
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.462.65
• Online since: February 2012
• Authors: Hui Qin Sun
• Keywords: Accelerometer, Charge Amplifier, ZnO Thin Film

References

[1] P. J. Costa Branco, J. A. Dente. On the electromechanics of a piezoelectric transducer using a bimorph cantilever undergoing asymmetric sensing and actuation. Smart Materials and Structures, 2004, 13: 631-642.

DOI: 10.1088/0964-1726/13/4/001

[2] P. verardi, F. Cracium, M. Dinescu, Processings of the Ultrasonics Symposium, Vol. 1, IEEE, New Jersey, 1997: 569-571.

[3] C. Huang, Y. Y. Lin, T. A. Tang. Study on the tip-deflection of a piezoelectric bimorph cantilever in the static state. Journal of Micromechanics and Microengineering, 2004, 14: 530-534.

DOI: 10.1088/0960-1317/14/4/013

[4] Baoyuan Sun, modern actuator technology, National Defence Industry Press, (2003).

[5] Weijie Dong, Yuguo Cui, voltage drive and current integrator by combining the piezoelectric charge control, computer measurement and control, 2002, 10 (4) : 260-262.

[6] Zhang, modern piezoelectricity (Volume), Science Press, (2001).

[7] J. J. Bernstein, S. L. Finberg, K. Houston, L. C. Niles, H. D. Chen, IEEE Trans. Ultrasonics, Ferroelec-trics, Frequency Contr. 2005, 44: 960-962.

DOI: 10.1109/58.655620

[8] M. Dubois, P. Muralt, Sens. Actuat. A1999, 77: 106-109.

[9] Dinghua Bao, Liangying Zhang. the film piezoelectric properties of the measurement method, Ceramic Society , 1999, 3: 18-22.

[10] F. Xu, F. Chu, S. Trolier-Mckinstry, J. Appl. Phys. 86 (1999) 588.

[11] J. D. N. Cheeke, Y. Zhang, Z. Wang, Processings of the Ultrasonics Symposium, Vol. 2, IEEE, New Jersey, 1998, p.1125.

[12] Xiaoxing Chang, Chaozhi Xing, Zhongliang He, a low frequency hysteresis loops measured under the new method, Test and Measurement Technology, 1997, 11 (1) : 16-20.

[13] Yicai Sun, Xinfu Liu, Qinghao Meng, et al. Sensor nonlinear signal processing and fusion of intelligence. Beijing: Metallurgical Industry Press, (2010).

[14] Liding Wang, Chong Liu. Micro Electro Mechanical Systems Science and technology trends. Dalian University of Technology, 2000, 40 (5) : 505-508.

[15] L. Q. Du,G. Kwon, F. Aria, et al. Structure design of micro touch sensor array. Sensors and Actuators A, 2003, 107: 7-13.

[16] Yicai Sun, Dongqing Pang. Microelectronics machining (MEMS) technology base. Beijing: Metallurgical Industry Press, (2009).

[17] H. MAiWA, JamesA. CHRISTMAN, Measurement of Piezoelectric Displacement of Pb (Zr, Ti) 03 Thin Films Using a Double-Beam Interferometer Jpn. J. Appl. Phy. Vol. 38 (1999) pp.5402-5405.

DOI: 10.1143/jjap.38.5402

[18] D. L. DeVoe. Thin film zinc oxide microsensors and microactuators: (dissertation). Berkeley: University of California, Berkeley, (1997).

[19] J. G. Smiths, S. I. Dalke, T. K. Cooney. The constituent equations of piezoelectric bimorphs. Sensors and Acuators A, 1991, 28: 41-61.

DOI: 10.1016/0924-4247(91)80007-c

[20] M. Brissaud, S. Ledren, P. Gonnard. Modelling of a cantilever non-symmetric piezoelectric bimorph. Journal of Micromechanics and Microengineering, 2003, 13: 832-844.

DOI: 10.1088/0960-1317/13/6/306

[21] M. S. Weinberg. Working equations for piezoelectric actuators and sensors. Journal of Microelectromechanical system, 1999, 8(4): 529-533.

DOI: 10.1109/84.809069