Model of Closed-Loop Detection System for Capacitive MEMS Accelerometer and its IC Realization

Abstract:

A type of closed-loop system model for capacitive MEMS accelerometer, with simple working clock , is presented in this paper. After establishing the force-feedback model and disgussing the magnitude of the feedback voltage, the readout interface IC for closed-loop detection is designed and the layout area of the ciruit is only 1435×2543 um². Post simulation results indicated that the circuit has large detection range, high accuracy and linearity, giving evidence for the validity of our model.

• Periodical: Advanced Materials Research (Volumes 468-471)
• Pages: 2170-2175
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.468-471.2170
• Online since: February 2012
• Authors: Bin Wang, He Ming Zhang, Hui Yong Hu, Zheng Yuan Zhang, Rong Xi Xuan, Chun Yu Zhou, Guan Yu Wang, Yu Ming Zhang
• Keywords: Closed-Loop Detection, Feedback-Control, MEMS Accelerometer, Sampling Amplification

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